SOI nano device fabrication

Xiaohui Tang, Nicolas Reckinger, V. Bayot

Résultats de recherche: Contribution à un événement scientifique (non publié)Résumé

langue originaleAnglais
étatPublié - 2004
EvénementAdvanced Research workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment - , Ukraine
Durée: 26 avr. 200430 avr. 2004

Comité scientifique

Comité scientifiqueAdvanced Research workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment
PaysUkraine
période26/04/0430/04/04

Citer ceci

Tang, X., Reckinger, N., & Bayot, V. (2004). SOI nano device fabrication. Résumé de Advanced Research workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment, Ukraine.
Tang, Xiaohui ; Reckinger, Nicolas ; Bayot, V. / SOI nano device fabrication. Résumé de Advanced Research workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment, Ukraine.
@conference{02aff3aeed5b4a0c90c54cebfdd1489f,
title = "SOI nano device fabrication",
author = "Xiaohui Tang and Nicolas Reckinger and V. Bayot",
year = "2004",
language = "English",
note = "Advanced Research workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment ; Conference date: 26-04-2004 Through 30-04-2004",

}

Tang, X, Reckinger, N & Bayot, V 2004, 'SOI nano device fabrication', Advanced Research workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment, Ukraine, 26/04/04 - 30/04/04.

SOI nano device fabrication. / Tang, Xiaohui; Reckinger, Nicolas; Bayot, V.

2004. Résumé de Advanced Research workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment, Ukraine.

Résultats de recherche: Contribution à un événement scientifique (non publié)Résumé

TY - CONF

T1 - SOI nano device fabrication

AU - Tang, Xiaohui

AU - Reckinger, Nicolas

AU - Bayot, V.

PY - 2004

Y1 - 2004

M3 - Abstract

ER -

Tang X, Reckinger N, Bayot V. SOI nano device fabrication. 2004. Résumé de Advanced Research workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment, Ukraine.