Silicon oxynitride and aluminum films interface : Rutherford backscattering and high resolution electron-energy-loss spectroscopic studies

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@article{ef64825b1ce2440d80c921a32d08b7c8,

title = "Silicon oxynitride and aluminum films interface : Rutherford backscattering and high resolution electron-energy-loss spectroscopic studies",

author = "{Diatezua Manpuya}, Deda and Paul Thiry and Guy Terwagne and Roland Caudano",

year = "1992",

language = "English",

volume = "269-270",

pages = "1054--1059",

journal = "Surface Science",

publisher = "Elsevier",

}