Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures

X. Tang, F. Ravaux, E. Dubois, E. Kasper, A. Karmous, Nicolas Reckinger, J.-P. Raskin

Résultats de recherche: Contribution dans un livre/un catalogue/un rapport/dans les actes d'une conférenceArticle dans les actes d'une conférence/un colloque

langue originaleAnglais
titre35th International Conference on Micro & Nano Engineering
étatPublié - 2009

Citer ceci

Tang, X., Ravaux, F., Dubois, E., Kasper, E., Karmous, A., Reckinger, N., & Raskin, J-P. (2009). Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures. Dans 35th International Conference on Micro & Nano Engineering
Tang, X. ; Ravaux, F. ; Dubois, E. ; Kasper, E. ; Karmous, A. ; Reckinger, Nicolas ; Raskin, J.-P. / Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures. 35th International Conference on Micro & Nano Engineering. 2009.
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title = "Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures",
author = "X. Tang and F. Ravaux and E. Dubois and E. Kasper and A. Karmous and Nicolas Reckinger and J.-P. Raskin",
year = "2009",
language = "English",
booktitle = "35th International Conference on Micro & Nano Engineering",

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Tang, X, Ravaux, F, Dubois, E, Kasper, E, Karmous, A, Reckinger, N & Raskin, J-P 2009, Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures. Dans 35th International Conference on Micro & Nano Engineering.

Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures. / Tang, X.; Ravaux, F.; Dubois, E.; Kasper, E.; Karmous, A.; Reckinger, Nicolas; Raskin, J.-P.

35th International Conference on Micro & Nano Engineering. 2009.

Résultats de recherche: Contribution dans un livre/un catalogue/un rapport/dans les actes d'une conférenceArticle dans les actes d'une conférence/un colloque

TY - GEN

T1 - Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures

AU - Tang, X.

AU - Ravaux, F.

AU - Dubois, E.

AU - Kasper, E.

AU - Karmous, A.

AU - Reckinger, Nicolas

AU - Raskin, J.-P.

PY - 2009

Y1 - 2009

M3 - Conference contribution

BT - 35th International Conference on Micro & Nano Engineering

ER -

Tang X, Ravaux F, Dubois E, Kasper E, Karmous A, Reckinger N et al. Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures. Dans 35th International Conference on Micro & Nano Engineering. 2009