Reaction of Si(100) with Silane-Methane Low-Power Plasma; SiC Buffer layer formation

Carla Bittencourt Papaleo Montes

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@article{ba208d40c7f24a0eacaec95347f6914a,

title = "Reaction of Si(100) with Silane-Methane Low-Power Plasma; SiC Buffer layer formation",

author = "{Bittencourt Papaleo Montes}, Carla",

year = "1999",

language = "English",

volume = "86",

pages = "4643--4648",

journal = "Journal of Applied Physics",

publisher = "American Institute of Physics Publising LLC",

}