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Résumé
A study of plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor is presented. Both experimental and numerical approaches are used to investigate thin film growth mechanisms and polymer film properties depending on the magnetic field strength. Combining both approaches enables the consistency of the numerical model to be checked while acquiring data for understanding the observed phenomena. Samples are first analyzed by x-ray photoelectron spectroscopy, time of flight secondary ion mass spectrometry, and ion beam analysis to illustrate the differences in degrees of chemical functionalization and cross-linking between the regions of high and low magnetic fields. 3D particle-in-cell Monte Carlo collision simulations are then performed to shed light on experimental results, after implementing a set of electron-cyclopropylamine collision cross sections computed using the R-matrix method. The simulations enable the main radicals produced in the discharge to be tracked by determining their production rates, how they diffuse in the plasma, and how they absorb on the reactor walls. Additionally, the cyclopropylamine ion (C3H7N+) behavior is followed to bring insights into the respective roles of ions and radicals during the plasma polymerization process.
langue originale | Anglais |
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Numéro d'article | 033003 |
journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 38 |
Numéro de publication | 3 |
Les DOIs | |
Etat de la publication | Publié - 1 avr. 2020 |
Financement
The authors gratefully acknowledge the financial support of the Walloon Region under the Flycoat Project (No. 1318147). For all simulations, computational resources were provided by the Consortium des Équipements de Calcul Intensif (CÉCI), funded by the Fonds de la Recherche Scientifique de Belgique (F.R.S.-FNRS) under Grant No. 2.5020.11. The authors would like to thank Dan Graham for developing the NESAC/BIO Toolbox used in this study and the NIH grant (No. EB-002027) for supporting the toolbox development. The authors also thank Céline Noël and Alexandre Felten for their assistance in the TOF-SIMS experiments and Paul-Louis Debarsy and Julien Colaux for their assistance in performing IBA experiments. The authors also acknowledge the SIAM platform of the University of Namur.
Bailleurs de fonds | Numéro du bailleur de fonds |
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Walloon Region | 1318147 |
National Institutes of Health | EB-002027 |
Fonds De La Recherche Scientifique - FNRS | 2.5020.11 |
Empreinte digitale
Examiner les sujets de recherche de « Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicals ». Ensemble, ils forment une empreinte digitale unique.Projets
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CÉCI – Consortium des Équipements de Calcul Intensif
CHAMPAGNE, B. (Responsable du Projet), Lazzaroni, R. (Responsable du Projet), Geuzaine , C. (Co-investigateur), Chatelain, P. (Co-investigateur) & Knaepen, B. (Co-investigateur)
1/01/18 → 31/12/22
Projet: Recherche
Équipement
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Plateforme Technologique Calcul Intensif
Champagne, B. (!!Manager)
Plateforme technologique Calcul intensifEquipement/installations: Plateforme technolgique
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Synthèse, Irradiation et Analyse de Matériaux (SIAM) (2016 - ...)
Louette, P. (!!Manager), Colaux, J. (!!Manager), Felten, A. (!!Manager), Tabarrant, T. (!!Operator), COME, F. (!!Operator) & Debarsy, P.-L. (!!Manager)
Plateforme technologique Synthese, irradiation et analyse des materiauxEquipement/installations: Plateforme technolgique