Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicals

Stella Mathioudaki, Cédric R. Vandenabeele, Romain Tonneau, Andreas Pflug, Jonathan Tennyson, Stéphane Lucas

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Résumé

A study of plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor is presented. Both experimental and numerical approaches are used to investigate thin film growth mechanisms and polymer film properties depending on the magnetic field strength. Combining both approaches enables the consistency of the numerical model to be checked while acquiring data for understanding the observed phenomena. Samples are first analyzed by x-ray photoelectron spectroscopy, time of flight secondary ion mass spectrometry, and ion beam analysis to illustrate the differences in degrees of chemical functionalization and cross-linking between the regions of high and low magnetic fields. 3D particle-in-cell Monte Carlo collision simulations are then performed to shed light on experimental results, after implementing a set of electron-cyclopropylamine collision cross sections computed using the R-matrix method. The simulations enable the main radicals produced in the discharge to be tracked by determining their production rates, how they diffuse in the plasma, and how they absorb on the reactor walls. Additionally, the cyclopropylamine ion (C3H7N+) behavior is followed to bring insights into the respective roles of ions and radicals during the plasma polymerization process.

langue originaleAnglais
Numéro d'article033003
journalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume38
Numéro de publication3
Les DOIs
Etat de la publicationPublié - 1 avr. 2020

Financement

The authors gratefully acknowledge the financial support of the Walloon Region under the Flycoat Project (No. 1318147). For all simulations, computational resources were provided by the Consortium des Équipements de Calcul Intensif (CÉCI), funded by the Fonds de la Recherche Scientifique de Belgique (F.R.S.-FNRS) under Grant No. 2.5020.11. The authors would like to thank Dan Graham for developing the NESAC/BIO Toolbox used in this study and the NIH grant (No. EB-002027) for supporting the toolbox development. The authors also thank Céline Noël and Alexandre Felten for their assistance in the TOF-SIMS experiments and Paul-Louis Debarsy and Julien Colaux for their assistance in performing IBA experiments. The authors also acknowledge the SIAM platform of the University of Namur.

Bailleurs de fondsNuméro du bailleur de fonds
Walloon Region1318147
National Institutes of HealthEB-002027
Fonds De La Recherche Scientifique - FNRS2.5020.11

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    • CÉCI – Consortium des Équipements de Calcul Intensif

      CHAMPAGNE, B. (Responsable du Projet), Lazzaroni, R. (Responsable du Projet), Geuzaine , C. (Co-investigateur), Chatelain, P. (Co-investigateur) & Knaepen, B. (Co-investigateur)

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