On the mechanism of the hydrogen-induced exfoliation of silicon

Markus Weldon; Vittorio Marsico; Yves Chabal; A. Agarwal; D. Eaglesham; J. Sapjeta; W. Brown; D. Jacobson; Yves Caudano; Stan Christman; Ed Chaban

On the mechanism of the hydrogen-induced exfoliation of silicon

Markus Weldon, Vittorio Marsico, Yves Chabal, A. Agarwal, D. Eaglesham, J. Sapjeta, W. Brown, D. Jacobson, Yves Caudano, Stan Christman, Ed Chaban

Namur Research Institute for Life Sciences

Résultats de recherche: Contribution à un journal/une revue › Article

langue originale	Anglais
Pages (de - à)	1065-1073
Nombre de pages	9
journal	Journal of vacuum science and technology B
Volume	15
Etat de la publication	Publié - 1997

Accès au document

http://dx.doi.org/10.1116/1.589416

Contient cette citation

@article{f2dec8396dc24b9a9948ac12bce79228,

title = "On the mechanism of the hydrogen-induced exfoliation of silicon",

author = "Markus Weldon and Vittorio Marsico and Yves Chabal and A. Agarwal and D. Eaglesham and J. Sapjeta and W. Brown and D. Jacobson and Yves Caudano and Stan Christman and Ed Chaban",

year = "1997",

language = "English",

volume = "15",

pages = "1065--1073",

journal = "Journal of vacuum science and technology B",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

}

On the mechanism of the hydrogen-induced exfoliation of silicon. / Weldon, Markus; Marsico, Vittorio; Chabal, Yves; Agarwal, A.; Eaglesham, D.; Sapjeta, J.; Brown, W.; Jacobson, D.; Caudano, Yves; Christman, Stan; Chaban, Ed.

Dans: Journal of vacuum science and technology B, Vol 15, 1997, p. 1065-1073.

Résultats de recherche: Contribution à un journal/une revue › Article

TY - JOUR

T1 - On the mechanism of the hydrogen-induced exfoliation of silicon

AU - Weldon, Markus

AU - Marsico, Vittorio

AU - Chabal, Yves

AU - Agarwal, A.

AU - Eaglesham, D.

AU - Sapjeta, J.

AU - Brown, W.

AU - Jacobson, D.

AU - Caudano, Yves

AU - Christman, Stan

AU - Chaban, Ed

PY - 1997

Y1 - 1997

M3 - Article

VL - 15

SP - 1065

EP - 1073

JO - Journal of vacuum science and technology B

JF - Journal of vacuum science and technology B

SN - 1071-1023

ER -