TY - JOUR
T1 - Nucleation study of titanium nitride onto steel using 15N(p,αγ)12C resonant nuclear reaction
AU - Roquiny, Philippe
AU - Mathot, Gilles
AU - Terwagne, Guy
AU - Bodart, Franz
AU - Van Den Brande, P.
N1 - Publication code : **RES. ACAD.
PY - 2000
Y1 - 2000
N2 - In this research, titanium nitride is deposited by reactive DC magnetron sputtering with two original constraints due to the expected industrial application as roll to roll decorative coating of steel: the samples should be grounded and could not be heated during deposition. The growth of titanium nitride on low-carbon steel has been studied using the 15N(p,αγ)12C resonant nuclear reaction analysis for 429 keV protons. Using gas flow of isotope 15N enriched nitrogen during deposition, it is possible to detect nitride layer of about 0.3 ML (MonoLayer) calculated thickness with the help of the above very sharp nuclear reaction. Films from 0.3 ML to bulk-like thicknesses deposited on low-carbon steel have been analysed. The spectra obtained were deconvoluted to obtain the straggled energy width and the height proportional to the depth of nitride layer and to the 15N coverage, respectively. It is then possible to observe the nitride growth onto steel substrates: an island nucleation is followed by coalescence and finally by a continuous growth. These three nucleation steps suggest an island growth mode, the basis of the well-known columnar structure for sputtered titanium nitride on steel.
AB - In this research, titanium nitride is deposited by reactive DC magnetron sputtering with two original constraints due to the expected industrial application as roll to roll decorative coating of steel: the samples should be grounded and could not be heated during deposition. The growth of titanium nitride on low-carbon steel has been studied using the 15N(p,αγ)12C resonant nuclear reaction analysis for 429 keV protons. Using gas flow of isotope 15N enriched nitrogen during deposition, it is possible to detect nitride layer of about 0.3 ML (MonoLayer) calculated thickness with the help of the above very sharp nuclear reaction. Films from 0.3 ML to bulk-like thicknesses deposited on low-carbon steel have been analysed. The spectra obtained were deconvoluted to obtain the straggled energy width and the height proportional to the depth of nitride layer and to the 15N coverage, respectively. It is then possible to observe the nitride growth onto steel substrates: an island nucleation is followed by coalescence and finally by a continuous growth. These three nucleation steps suggest an island growth mode, the basis of the well-known columnar structure for sputtered titanium nitride on steel.
U2 - 10.1016/S0168-583X(99)00819-8
DO - 10.1016/S0168-583X(99)00819-8
M3 - Article
SN - 0168-583X
VL - 161-163
SP - 600
EP - 604
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ER -