Molecular depth profiling of polymers with very low energy ions

Nicolas Mine, Laurent Houssiau

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polycarbonate, polymethylmethacrylate and polyethylene terephtalate films were depth-profiled with 200 eV Cs+ and 500eV O2+ ions. Best profiles were obtained in the negative mode, due to a strong negative ionisation yield enhancement related to Cs retention in the polymer. A relatively high and stable signal from the most characteristic ions was measured all over the layer. 500eV O2+, real molecular depth-profiles were also obtained on PMMA in both the positive and the negative mode.With Cs implanted, MCsn+ clusters were observed in the positive polarity.
langue originaleAnglais
Pages (de - à)3-23
Nombre de pages21
journalPhysicalia Magazine
Etat de la publicationPublié - 2008

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