Résumé
Different hydrogen implantation conditions as well as co-implantation of various elemental species are used to study the different exfoliation mechanisms. Substantial differences between the concentration/thermal evolution of the bound hydrogen of pure H-implantation and He/H co-implantation are shown. For co-implantation, the initial concentration of Si-H species decreased compared to pure H-implantation. The balance of implanted hydrogen must be in the form of molecular hydrogen that is invisible to infrared radiation.
langue originale | Anglais |
---|---|
titre | IEEE International SOI Conference |
rédacteurs en chef | Anon |
Editeur | IEEE |
Pages | 124-125 |
Nombre de pages | 2 |
Etat de la publication | Publié - 1997 |
Evénement | Proceedings of the 1997 IEEE International SOI Conference - Fish Camp, États-Unis Durée: 6 oct. 1997 → 9 oct. 1997 |
Une conférence
Une conférence | Proceedings of the 1997 IEEE International SOI Conference |
---|---|
Pays/Territoire | États-Unis |
La ville | Fish Camp |
période | 6/10/97 → 9/10/97 |