Résumé
A study is conducted to investigate the interface between polysilazane (PSZ)coatings and Mo films for understanding adhesion. Two kinds of Mo/PSZ samples are investigated and the chemical environments of their interfaces are compared. Ultra-thin Mo films are deposited on PSZ coatings to probe the interface directly by X-ray photoelectron spectroscopy (XPS) and to avoid long sputtering times in depth profiling of Mo films. The investigations reveal that the sputtered Mo films systematically adhere well to PSZ coatings. The good adhesion arises from a formation of molybdenum oxycarbonitride or molybdenum carbonitride ceramics through covalent bonding between atoms from PSZ and Mo at the interface.
| langue originale | Anglais |
|---|---|
| Pages (de - à) | 202-206 |
| Nombre de pages | 5 |
| journal | Applied Surface Science |
| Volume | 343 |
| Les DOIs | |
| Etat de la publication | Publié - 15 juil. 2015 |
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Synthèse, Irradiation et Analyse de Matériaux (SIAM) (2016 - ...)
Louette, P. (!!Manager), Colaux, J. (!!Manager), Felten, A. (!!Manager), Tabarrant, T. (!!Operator), COME, F. (!!Operator) & Debarsy, P.-L. (!!Manager)
Plateforme technologique Synthese, irradiation et analyse des materiauxEquipement/installations: Plateforme technolgique