In situ infrared ellipsometry study of plasma processing of metallic surface

B. DREVILLON, N. BERTRAND, P. BULKIN, Stephane Lucas, S. BENAYOUN

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langue originale	Anglais
Pages (de - à)	362-367
Nombre de pages	6
journal	Surface and Coatings Technology
Volume	94/95
Etat de la publication	Publié - 1997

Contient cette citation

@article{38d8ef937be44715a6a46f04435bb0fd,

title = "In situ infrared ellipsometry study of plasma processing of metallic surface",

author = "B. DREVILLON and N. BERTRAND and P. BULKIN and Stephane Lucas and S. BENAYOUN",

year = "1997",

language = "English",

volume = "94/95",

pages = "362--367",

journal = "Surface and Coatings Technology",

publisher = "Elsevier",

}