High resolution electron energy loss spectroscopic characterization of insulators for Si technology

Michael Liehr, Paul Thiry

Résultats de recherche: Contribution à un journal/une revue › Article

langue originale	Français
Pages (de - à)	1013-1032
Nombre de pages	20
journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	54/55
Etat de la publication	Publié - 1990

Contient cette citation

@article{6e822996532543caa695564f51e42fb7,

title = "High resolution electron energy loss spectroscopic characterization of insulators for Si technology",

author = "Michael Liehr and Paul Thiry",

year = "1990",

language = "Fran{\c c}ais",

volume = "54/55",

pages = "1013--1032",

journal = "Journal of Electron Spectroscopy and Related Phenomena",

publisher = "Elsevier",

}