High resolution depth profiling of nitrogen in AlN layers

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langue originale	Anglais
Pages (de - à)	262-266
Nombre de pages	5
journal	Nuclear instruments and methods in physics research B
Volume	66
Etat de la publication	Publié - 1992

Contient cette citation

@article{3c049f18ba2544f99e5c5cee8b3a0a05,

title = "High resolution depth profiling of nitrogen in AlN layers",

author = "Guy Terwagne and Stephane Lucas and Franz Bodart",

year = "1992",

language = "English",

volume = "66",

pages = "262--266",

journal = "Nuclear instruments and methods in physics research B",

issn = "1872-9584",

publisher = "Elsevier",

}