Formation of a SiC buffer layer by reaction of Si(100) with methane and hydrogen plasma

Carla Bittencourt Papaleo Montes

Résultats de recherche: Contribution à un journal/une revue › Article

langue originale	Anglais
Pages (de - à)	2478-2482
Nombre de pages	5
journal	Journal of Physics D: Applied Physics
Volume	32
Etat de la publication	Publié - 1999

Contient cette citation

@article{472b77c14e5a4166abc85e45db08a39e,

title = "Formation of a SiC buffer layer by reaction of Si(100) with methane and hydrogen plasma",

author = "{Bittencourt Papaleo Montes}, Carla",

year = "1999",

language = "English",

volume = "32",

pages = "2478--2482",

journal = "Journal of Physics D: Applied Physics ",

issn = "1361-6463",

publisher = "IOP Publishing Ltd.",

}