Experimental and theoretical study of a magnetron DC-PECVD acetylene discharge: Identification of the deposition precursors and film growth mechanisms

Engineering

• Prediction 100%
• Theoretical Study 100%
• Growth Mechanism 100%
• Dangling Bond 66%
• Experiments 33%
• Obtains 33%
• Models 33%
• Substrates 33%
• Measurement 33%
• Error 33%
• Simulation 33%
• Low Pressure 33%
• Deposited Film 33%
• Equilibrium Coverage 33%
• Deposition Parameter 33%
• Main Point 33%
• Deposition Mechanism 33%
• Plasma 33%
• Surface Coverage 33%
• Surface Model 33%

Chemistry

• Reaction Mechanism 100%
• Acetylene 100%
• Liquid Film 100%
• Plasma Enhanced Chemical Vapor Deposition 100%
• Surface 33%
• Equilibrium 33%
• Dangling Bond 33%
• Procedure 16%
• Rutherford Backscattering Spectroscopy 16%
• Time 16%
• Argon 16%
• Pressure 16%
• Ion 16%
• Gaussian 16%
• Error 16%
• Monte Carlo Method 16%
• Plasma 16%
• Sputtering Target 16%