Characterization of unbalanced magnetron sputtered Si-Al coatings

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langue originale	Anglais
Pages (de - à)	334-338
Nombre de pages	5
journal	"Revue ""le vide : science, technique et applications"""
Volume	284
Etat de la publication	Publié - 1997

Contient cette citation

@article{2cad35708298480d8f6f1e57c38b2851,

title = "Characterization of unbalanced magnetron sputtered Si-Al coatings",

author = "Marco Jacobs and Guy Terwagne and Franz Bodart",

year = "1997",

language = "English",

volume = "284",

pages = "334--338",

journal = "{"}Revue {"}{"}le vide : science, technique et applications{"}{"}{"}",

publisher = "Soci{\'e}t{\'e} Fran{\c c}aise du Vide",

}