Advanced characterization of high-k materials: a nuclear approach

B. Brijs; C. Huyghebaert; S. Nauwelaerts; M. Caymax; W. Vandervorst; K. Nakajima; K. Kimura; A. Bergamier; G. Döllinger; W.N. Lennard; Guy Terwagne; A. Vantomme

Advanced characterization of high-k materials: a nuclear approach

B. Brijs, C. Huyghebaert, S. Nauwelaerts, M. Caymax, W. Vandervorst, K. Nakajima, K. Kimura, A. Bergamier, G. Döllinger, W.N. Lennard, Guy Terwagne, A. Vantomme

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langue originale	Anglais
Pages (de - à)	505-509
Nombre de pages	5
journal	Nuclear instruments and methods in physics research
Volume	190
Etat de la publication	Publié - 2002

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43909Accepted author manuscript, 187 KB

Contient cette citation

@article{f76fa7f49904450b8e7a22ba346b6d2b,

title = "Advanced characterization of high-k materials: a nuclear approach",

keywords = " Nuclear reaction analysis, Thin film, High-k, Elastic recoil detection, Rutherford backscattering",

author = "B. Brijs and C. Huyghebaert and S. Nauwelaerts and M. Caymax and W. Vandervorst and K. Nakajima and K. Kimura and A. Bergamier and G. D{\"o}llinger and W.N. Lennard and Guy Terwagne and A. Vantomme",

year = "2002",

language = "English",

volume = "190",

pages = "505--509",

journal = "Nuclear Instruments and Methods in Physical Research B",

issn = "0168-583X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Advanced characterization of high-k materials: a nuclear approach

AU - Brijs, B.

AU - Huyghebaert, C.

AU - Nauwelaerts, S.

AU - Caymax, M.

AU - Vandervorst, W.

AU - Nakajima, K.

AU - Kimura, K.

AU - Bergamier, A.

AU - Döllinger, G.

AU - Lennard, W.N.

AU - Terwagne, Guy

AU - Vantomme, A.

PY - 2002

Y1 - 2002

KW - Nuclear reaction analysis

KW - Thin film

KW - High-k

KW - Elastic recoil detection

KW - Rutherford backscattering

M3 - Article

VL - 190

SP - 505

EP - 509

JO - Nuclear Instruments and Methods in Physical Research B

JF - Nuclear Instruments and Methods in Physical Research B

SN - 0168-583X

ER -