Résumé
Molybdenum films are investigated on stainless steel substrates coated with polysilazane based sol-gel and SiO layers for flexible CIGS solar cell applications. Thermal stability of the multilayer has been studied. The thickness of polysilazane films are significantly reduced (17%) after heat treatment suggesting a thermal degradation. Four different microstructures were found for Mo films by varying argon total pressure from 2.6 × 10 Pa to 2.6 Pa. It was shown that continuous films, low sheet resistance (0.5 ω/□) and well facetted grains can be achieved when Mo films are deposited on heated substrates at homologous temperature, T of 0.2.
langue originale | Anglais |
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Pages (de - à) | 535-540 |
Nombre de pages | 6 |
journal | Thin Solid Films |
Volume | 531 |
Les DOIs | |
Etat de la publication | Publié - 1 janv. 2013 |
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Synthèse, Irradiation et Analyse de Matériaux (SIAM) (2016 - ...)
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