TY - JOUR
T1 - A round robin experiment of elemental sensitivity factors in low-energy ion scattering
AU - Brongersma, H.H.
AU - Carrere-Fontaine, M.
AU - Cortenraad, R.
AU - Denier Van Der Gon, A.W.
AU - Scanlon, P.J.
AU - Spolveri, I.
AU - Cortigiani, B.
AU - Bardi, U.
AU - Taglauer, E.
AU - Reiter, S.
AU - Labich, S.
AU - Bertrand, Patrick
AU - Houssiau, L.
AU - Speller, S.
AU - Parascandola, S.
AU - Ünlü-Lachnitt, H.
AU - Heiland, W.
PY - 1998/7/1
Y1 - 1998/7/1
N2 - In a round robin experiment a set of five polycrystalline, metallic samples is studied by low-energy ion scattering (LEIS) in five different laboratories. The energy range is 0.6-3.5 keV and He and Ne ions are used. Even though different experimental setups are used the evaluated elemental sensitivity factors agree within ±20%. Reproducibility within single laboratories is better than 10%. In an additional study carried out in three laboratories the surface composition of an alloy, CuPd, was determined, using in situ calibration standards. These surface composition measurements agreed within ±3 at% demonstrating that quantitative composition determination is possible using this procedure.
AB - In a round robin experiment a set of five polycrystalline, metallic samples is studied by low-energy ion scattering (LEIS) in five different laboratories. The energy range is 0.6-3.5 keV and He and Ne ions are used. Even though different experimental setups are used the evaluated elemental sensitivity factors agree within ±20%. Reproducibility within single laboratories is better than 10%. In an additional study carried out in three laboratories the surface composition of an alloy, CuPd, was determined, using in situ calibration standards. These surface composition measurements agreed within ±3 at% demonstrating that quantitative composition determination is possible using this procedure.
UR - http://www.scopus.com/inward/record.url?scp=0032121187&partnerID=8YFLogxK
U2 - 10.1016/S0168-583X(98)00264-X
DO - 10.1016/S0168-583X(98)00264-X
M3 - Article
AN - SCOPUS:0032121187
SN - 0168-583X
VL - 142
SP - 377
EP - 386
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 3
ER -