INIS
nitrogen
76%
sputtering
32%
aluminium nitrides
30%
nucleation
29%
aluminum
29%
aluminium
29%
kev range
26%
doses
25%
distribution
24%
ion implantation
22%
depth
20%
x-ray spectroscopy
19%
surfaces
19%
carbon
17%
high temperature
17%
carbon ions
17%
nuclear reaction analysis
17%
rutherford backscattering spectrometry
15%
onions
14%
tantalum
14%
titanium nitrides
14%
nitrogen 15
14%
growth
14%
nitrogen 14
14%
rhodium
14%
doppler broadening
14%
iron
14%
yields
14%
lithium
14%
oxidation
14%
neon
14%
channeling
14%
beryllium
14%
superconductors
14%
chromium
14%
migration
14%
tin
14%
devices
14%
nitrides
13%
energy
12%
nitrogen ions
11%
wear
10%
ions
10%
chromium nitrides
9%
concentration
8%
resolution
8%
foils
7%
chemical bonds
7%
islands
7%
carbon steels
7%
Material Science
Aluminum
100%
Nitride Compound
51%
Aluminum Nitride
50%
Ion Implantation
36%
Oxidation Reaction
29%
Nucleation
29%
Silver
29%
Lithium
29%
Magnetron Sputtering
25%
Secondary Ion Mass Spectrometry
22%
Titanium
22%
Cathode
22%
X-Ray Spectroscopy
21%
Thin Films
19%
Boron
18%
Stainless Steel
18%
X-Ray Photoelectron Spectroscopy
17%
Oxynitride
14%
Silicon
14%
Inert Gas
14%
Elemental Analysis
14%
Superconducting Material
14%
Fretting
14%
Diamond
14%
Density
14%
Tantalum
14%
Thermal Diffusion
14%
Rhodium
14%
Ion Beam Mixing
14%
Molybdenum
14%
Nanohardness
14%
Chromium
14%
Chemical Bonding
11%
Rutherford Backscattering Spectrometry
8%
Oxide Compound
8%
Grain Boundary
8%
Mass Spectrometry
7%
Scanning Electron Microscopy
7%
Cobalt
7%
Wear Resistance
7%
Tribological Performance
7%
Platelet
7%
Surface Engineering
7%
Film
6%
Aluminum Foil
5%
Keyphrases
Profilometry
14%
High-resolution Depth Profiling
14%
Nuclear Microprobe
14%
Diffusion Studies
14%
Tantalum
14%
Aluminum Determination
14%
Magnetron Sputtering
14%
Sputtering Target
14%
Silicon Determination
14%
Ionic Movement
14%
Direct Implantation
14%
Doppler Broadening
14%
Rhodium
14%
Anodic Oxidation
14%
Titanium Nitride
14%
Thermal Annealing
14%
Generating Device
14%
Threshold Analysis
14%
Lithium Coating
14%
Li Coating
14%
Beryllium
14%
X-ray Spectroscopy
14%
Low-energy Electrons
14%
Electron Induced
14%
Carbon Phase
14%
Carbon Concentration
14%
Carbon Onions
14%
Phase Formation
14%
Silver Substrate
14%
Carbon Implantation
14%
Neon
14%
Working Point
14%
Migration Studies
14%
Point Conditions
14%
Numerical Modeling
14%
Superconductor
14%
Light Element Analysis
14%
Nuclear Probes
14%
YBaCuO
14%
Nanohardness
14%
Dose Dependence
14%
Fe2N
14%
Numerical Model
14%
CrO2
14%
Unbalanced Magnetron
14%
Chromium Oxynitride
14%
Sputtering Modes
14%
Reactive Sputtering
14%
Oxidation Effect
9%
Anodic Process
9%