X-ray photoelectron spectroscopy

    Research output: Contribution in Book/Catalog/Report/Conference proceedingChapter

    Original languageEnglish
    Title of host publicationAnalysis of Microelectronic Materials and Devices
    EditorsM. Grasserbauer, H.W. Werner
    Place of PublicationChichester New york
    PublisherJohn Wiley & Sons
    Publication statusPublished - 1991

    Cite this

    Pireaux, J-J., & Sporken, R. (1991). X-ray photoelectron spectroscopy. In M. Grasserbauer, & H. W. Werner (Eds.), Analysis of Microelectronic Materials and Devices John Wiley & Sons.