| Original language | English |
|---|---|
| Title of host publication | Analysis of Microelectronic Materials and Devices |
| Editors | M. Grasserbauer, H.W. Werner |
| Place of Publication | Chichester New york |
| Publisher | John Wiley & Sons |
| Publication status | Published - 1991 |
X-ray photoelectron spectroscopy
Research output: Contribution in Book/Catalog/Report/Conference proceeding › Chapter