Wide range investigation of duty cycle and frequency effects on bipolar magnetron sputtering of chromium nitride

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    Projet Inoxypem

    Haye, E., Job, N., Pireaux, J., Deschamps, F. L., Lafort, A., Alarcón, P., Duysinx, P., Stergiopoulos, V., Archambeau, C. & Pecceu, S.


    Project: Research