Wide range investigation of duty cycle and frequency effects on bipolar magnetron sputtering of chromium nitride

Emile Haye, Julien L. Colaux, Pavel Moskovkin, Jean Jacques Pireaux, Stéphane Lucas

Research output: Contribution to journal › Article › peer-review

1 results

Finished
Projet Inoxypem
Haye, E., Job, N., Pireaux, J., Deschamps, F. L., Lafort, A., Alarcón, P., Duysinx, P., Stergiopoulos, V., Archambeau, C. & Pecceu, S.
15/11/16 → 30/06/20
Project: Research