Vertical Two¿dimensional Piezoelectric Inertial Slider for Scanning Tunneling

Laurent Libioulle, Antoine Ronda, Isabelle Derycke, Jean-Pol Vigneron, Jean-Marie Gilles

Research output: Contribution to journalArticle

Original languageFrench
Pages (from-to)1489-1494
Number of pages6
JournalMicroscopeRev. Sc. Instrum.
Volume64
Publication statusPublished - 1993

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