Using ammonia for reactive magnetron sputtering, a possible alternative to HiPIMS?

Louis Rassinfosse, Julien L. Colaux, David Pilloud, Alexandre Nominé, Nikolay Tumanov, Stéphane Lucas, Jean Jacques Pireaux, Emile Haye

University of Namur

Research output: Contribution to journal › Article › peer-review

3 results
- Title(descending)

Morphology - Imaging
Francesca Cecchet (Manager) & Henri-Francois Renard (Manager)
Technological Platform Morphology - Imaging
Facility/equipment: Technological Platform
Physical Chemistry and characterization(PC2)
Johan Wouters (Manager) & Carmela Aprile (Manager)
Technological Platform Physical Chemistry and characterization
Facility/equipment: Technological Platform
Synthesis, Irradiation and Analysis of Materials (SIAM)
Pierre Louette (Manager), Julien Colaux (Manager), Alexandre Felten (Manager), Tijani Tabarrant (Operator), Frederic COME (Operator) & Paul-Louis Debarsy (Manager)
Technological Platform Synthesis, Irradiation and Analysis of Materials
Facility/equipment: Technological Platform