Use of reactive sputtering model to predict working point conditions of two different TiNx sputtering devices

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	28-32
Number of pages	5
Journal	"Revue ""le vide : science, technique et applications"""
Volume	284
Publication status	Published - 1997

Cite this

@article{ebcf7f4ba1a245a48da55f2afaa9e8d4,

title = "Use of reactive sputtering model to predict working point conditions of two different TiNx sputtering devices",

author = "Philippe Roquiny and Franz Bodart and Stephane Lucas and Guy Terwagne",

year = "1997",

language = "English",

volume = "284",

pages = "28--32",

journal = "{"}Revue {"}{"}le vide : science, technique et applications{"}{"}{"}",

publisher = "Soci{\'e}t{\'e} Fran{\c c}aise du Vide",

}

TY - JOUR

T1 - Use of reactive sputtering model to predict working point conditions of two different TiNx sputtering devices

AU - Roquiny, Philippe

AU - Bodart, Franz

AU - Lucas, Stephane

AU - Terwagne, Guy

PY - 1997

Y1 - 1997

M3 - Article

VL - 284

SP - 28

EP - 32

JO - "Revue ""le vide : science, technique et applications"""

JF - "Revue ""le vide : science, technique et applications"""

ER -