Use of reactive sputtering model to predict working point conditions of two different TiNx sputtering devices

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)28-32
Number of pages5
Journal"Revue ""le vide : science, technique et applications"""
Volume284
Publication statusPublished - 1997

Cite this

@article{ebcf7f4ba1a245a48da55f2afaa9e8d4,
title = "Use of reactive sputtering model to predict working point conditions of two different TiNx sputtering devices",
author = "Philippe Roquiny and Franz Bodart and Stephane Lucas and Guy Terwagne",
year = "1997",
language = "English",
volume = "284",
pages = "28--32",
journal = "{"}Revue {"}{"}le vide : science, technique et applications{"}{"}{"}",
issn = "1266-0167",
publisher = "Soci{\'e}t{\'e} Fran{\cc}aise du Vide",

}

TY - JOUR

T1 - Use of reactive sputtering model to predict working point conditions of two different TiNx sputtering devices

AU - Roquiny, Philippe

AU - Bodart, Franz

AU - Lucas, Stephane

AU - Terwagne, Guy

PY - 1997

Y1 - 1997

M3 - Article

VL - 284

SP - 28

EP - 32

JO - "Revue ""le vide : science, technique et applications"""

JF - "Revue ""le vide : science, technique et applications"""

SN - 1266-0167

ER -