Unbalanced magnetron sputtered Si-Al coatings: plasma conditions and film properties versus sample bias voltage

Marco Jacobs, Guy Terwagne, Philippe Roquiny, Franz Bodart

Research output: Contribution to journalArticle

63 Downloads (Pure)
Original languageEnglish
Pages (from-to)735-741
Number of pages7
JournalSurface and Coatings Technology
Volume116-119
Publication statusPublished - 1999

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