Unbalanced magnetron sputtered Si-Al coatings: plasma conditions and film properties versus sample bias voltage

Marco Jacobs, Guy Terwagne, Philippe Roquiny, Franz Bodart

    Research output: Contribution to journalArticlepeer-review

    68 Downloads (Pure)
    Original languageEnglish
    Pages (from-to)735-741
    Number of pages7
    JournalSurface and Coatings Technology
    Volume116-119
    Publication statusPublished - 1999

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