Original language | English |
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Pages (from-to) | 735-741 |
Number of pages | 7 |
Journal | Surface and Coatings Technology |
Volume | 116-119 |
Publication status | Published - 1999 |
Unbalanced magnetron sputtered Si-Al coatings: plasma conditions and film properties versus sample bias voltage
Marco Jacobs, Guy Terwagne, Philippe Roquiny, Franz Bodart
Research output: Contribution to journal › Article › peer-review
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