UHV reactive sputtering of AlN(0001) single crystals on Si(111) at high temperature by a two-step growth method

Frédéric Malengreau, Serge Hagège, Robert Sporken, Marc Vermeersch, Roland Caudano

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	1807-1811
Number of pages	5
Journal	Journal of the European ceramic society
Issue number	17
Publication status	Published - 1997

Cite this

@article{c737af7c6d014891a85edefd76afd6c0,

title = "UHV reactive sputtering of AlN(0001) single crystals on Si(111) at high temperature by a two-step growth method",

author = "Fr{\'e}d{\'e}ric Malengreau and Serge Hag{\`e}ge and Robert Sporken and Marc Vermeersch and Roland Caudano",

note = "Publication code : **RES. ACAD.",

year = "1997",

language = "English",

pages = "1807--1811",

journal = "Journal of the European ceramic society",

publisher = "Elsevier",

number = "17",

}

TY - JOUR

T1 - UHV reactive sputtering of AlN(0001) single crystals on Si(111) at high temperature by a two-step growth method

AU - Malengreau, Frédéric

AU - Hagège, Serge

AU - Sporken, Robert

AU - Vermeersch, Marc

AU - Caudano, Roland

N1 - Publication code : **RES. ACAD.

PY - 1997

Y1 - 1997

M3 - Article

SP - 1807

EP - 1811

JO - Journal of the European ceramic society

JF - Journal of the European ceramic society

IS - 17

ER -