UHV reactive sputtering of AlN(0001) single crystals on Si(111) at high temperature by a two-step growth method

Frédéric Malengreau, Serge Hagège, Robert Sporken, Marc Vermeersch, Roland Caudano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1807-1811
Number of pages5
JournalJournal of the European ceramic society
Issue number17
Publication statusPublished - 1997

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