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Dive into the research topics of 'ToF-SIMS depth profiling of Hf and Al composition variations in ultrathin mixed HfO2/Al2O3oxides'. Together they form a unique fingerprint.- Sort by
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L. Houssiau, R.G. Vitchev, T. Conard, W. Vandervorst, H. Bender
Research output: Contribution to journal › Article › peer-review