Fingerprint
Dive into the research topics of 'Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process
J.-M. Chappé, N. Martin, J. Lintymer, F. Sthal, G. Terwagne, J. Takadoum
Research output: Contribution to journal › Article › peer-review
1478
Downloads
(Pure)