Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process

J.-M. Chappé, N. Martin, J. Lintymer, F. Sthal, G. Terwagne, J. Takadoum

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Synthesis, Irradiation and Analysis of Materials (SIAM)
Pierre Louette (Manager), Julien Colaux (Manager), Alexandre Felten (Manager), Tijani Tabarrant (Operator), Frederic COME (Operator) & Paul-Louis Debarsy (Manager)
Technological Platform Synthesis, Irradiation and Analysis of Materials
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