Three-dimensional kinetic Monte Carlo simulations of cubic transition metal nitride thin film growth

Florin Nita, Cedric Mastail, Gregory Abadias

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)064107
JournalPhys. Rev. B.
Volume93
Publication statusPublished - 2016
Externally publishedYes

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