Three-Dimensional Intercalated Porous Graphene on Si(111)

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Three-dimensional intercalated porous graphene has been formed on Si(111) by electron beam evaporation under appropriate conditions and its structural and electronic properties investigated in detail by reflection high-energy electron diffraction, x-ray photoemission spectroscopy, Raman spectroscopy, high-resolution scanning electron microscopy, atomic force microscopy, and scanning tunneling microscopy. The results show that the crystalline quality of the porous graphene depended not only on the substrate temperature but also on the SiC layer thickness during carbon atom deposition.
Original languageEnglish
Pages (from-to)1575-1582
Number of pages8
JournalJournal of Electronic Materials
Issue number2
Publication statusPublished - 19 Nov 2017


  • 3D graphene
  • amorphous carbon
  • electron beam evaporation
  • graphene on Si(111)
  • graphitic carbon
  • porous graphene


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