Synthesis of titanium dioxide nanoparticles by reactive DC magnetron sputtering

L. Dreesen, J.-F. Colomer, H. Limage, A. Giguère, S. Lucas

Research output: Contribution to journalArticlepeer-review


Nanometer-sized titanium dioxide (TiO ) particles were prepared on carbon substrates by reactive direct-current magnetron sputtering. By performing measurements with high resolution electron microscopes, the mean nanoparticle diameter and the coverage fraction of the substrate by the nanoparticles (NPs) were measured at 19 nm and 30%, respectively. Moreover, electron diffraction analysis showed that the TiO NPs' crystalline structure on the carbon substrate was a mixture of anatase and rutile. Finally, we provided information on the TiO initial growth stage: crystalline NPs were formed after deposition of amorphous nanoparticles on the substrate and heating. © 2009 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)112-115
Number of pages4
JournalThin Solid Films
Issue number1
Publication statusPublished - 2 Nov 2009


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