Synthesis of titanium dioxide nanoparticles by reactive DC magnetron sputtering

Research output: Contribution to journalArticle

Abstract

Nanometer-sized titanium dioxide (TiO ) particles were prepared on carbon substrates by reactive direct-current magnetron sputtering. By performing measurements with high resolution electron microscopes, the mean nanoparticle diameter and the coverage fraction of the substrate by the nanoparticles (NPs) were measured at 19 nm and 30%, respectively. Moreover, electron diffraction analysis showed that the TiO NPs' crystalline structure on the carbon substrate was a mixture of anatase and rutile. Finally, we provided information on the TiO initial growth stage: crystalline NPs were formed after deposition of amorphous nanoparticles on the substrate and heating. © 2009 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)112-115
Number of pages4
JournalThin Solid Films
Volume518
Issue number1
DOIs
Publication statusPublished - 2 Nov 2009

Fingerprint

titanium oxides
Magnetron sputtering
Titanium dioxide
magnetron sputtering
direct current
Nanoparticles
nanoparticles
synthesis
Substrates
Carbon
Crystalline materials
carbon
Electron diffraction
anatase
rutile
Electron microscopes
electron diffraction
electron microscopes
titanium dioxide
Heating

Cite this

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title = "Synthesis of titanium dioxide nanoparticles by reactive DC magnetron sputtering",
abstract = "Nanometer-sized titanium dioxide (TiO ) particles were prepared on carbon substrates by reactive direct-current magnetron sputtering. By performing measurements with high resolution electron microscopes, the mean nanoparticle diameter and the coverage fraction of the substrate by the nanoparticles (NPs) were measured at 19 nm and 30{\%}, respectively. Moreover, electron diffraction analysis showed that the TiO NPs' crystalline structure on the carbon substrate was a mixture of anatase and rutile. Finally, we provided information on the TiO initial growth stage: crystalline NPs were formed after deposition of amorphous nanoparticles on the substrate and heating. {\circledC} 2009 Elsevier B.V. All rights reserved.",
author = "L. Dreesen and J.-F. Colomer and H. Limage and A. Gigu{\`e}re and S. Lucas",
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Synthesis of titanium dioxide nanoparticles by reactive DC magnetron sputtering. / Dreesen, L.; Colomer, J.-F.; Limage, H.; Giguère, A.; Lucas, S.

In: Thin Solid Films, Vol. 518, No. 1, 02.11.2009, p. 112-115.

Research output: Contribution to journalArticle

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T1 - Synthesis of titanium dioxide nanoparticles by reactive DC magnetron sputtering

AU - Dreesen, L.

AU - Colomer, J.-F.

AU - Limage, H.

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AU - Lucas, S.

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