Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

Jonathan Dervaux; Pavel Moskovkin; P-A. Cormier; O. Douhéret; Stephanos Konstantinidis; Roberto Lazzaroni; Stéphane Lucas; Rony Snyders

doi:10.1016/j.tsf.2017.06.006

Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

Jonathan Dervaux, Pavel Moskovkin, P-A. Cormier, O. Douhéret, Stephanos Konstantinidis, Roberto Lazzaroni, Stéphane Lucas, Rony Snyders

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Abstract

In this work, glancing angle deposition and magnetron sputtering are combined to synthesize nanostructured Ti films. Different type of microstructures (tilted columns, straight pillars, zigzags) are obtained as a function of the
experimental conditions. As a support, kinetic Monte Carlo simulations are performed to understand the observed trends using the NASCAM (NAnoSCAle Modeling) code. The latter is used to simulate the growth of the
films and to explain the effect on the obtained structures of experimental parameters such as the substrate temperature, the gas pressure as well as the substrate tilting and rotation speed. NASCAM enables quantitative prediction
of the density, the surface roughness, and the columnshape asymmetry. In addition, the effective porosity (ϕe) of the structures was evaluated from the simulation data for two molecules presenting different size (0.64 and 3.20 nm). The results show that ϕe decreases with the size of the adsorbed molecule, from above 50% for the small molecule to below 10% for the larger one. This is understood by considering the accessibility of the pore as a function of the size of the molecules. These data are correlated to experimental results obtained by
transmission electron microscopy.

Original language	English
Pages (from-to)	644-657
Number of pages	14
Journal	Thin Solid Films
Volume	636
DOIs	https://doi.org/10.1016/j.tsf.2017.06.006
Publication status	Published - 31 Aug 2017

Funding

The authors would like to thank the “Fédération Wallonie-Bruxelles” through the ARC project MADSSCELLS (AUWB-2012-12/17-UMONS No. 2), the Science Policy Office of the Belgian Federal Government through the “Pôle d'Attraction Interuniversitaire” program (PAI, P7/34, “Plasma-Surface Interaction”, Ψ and PAI 7/5 ‘Functional Supramolecular Systems’) and FNRS-FRFC. Dr Mireille RICHARD-PLOUET and Stéphane Grolleau from Institut des Matériaux Jean Rouxel de Nantes (IMN) for the porosity measurements. SK is research associate of National Fund for Scientific Research (FNRS – Belgium).

Funders	Funder number
FNRS‐FRFC
IMN
Institut des Matériaux Jean Rouxel de Nantes
Belgische Federale Overheidsdiensten	P7/34
Australian Research Council	AUWB-2012-12/17-UMONS
Fonds de la Recherche Scientifique F.R.S.-FNRS
Fédération Wallonie-Bruxelles

Keywords

Monte Carlo simulation
Titanium Thin films
Glancing angle deposition
Magnetron sputtering
Nanostructured films
Porosity
Thin films
Titanium

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10.1016/j.tsf.2017.06.006

Synthesis of nanostructured Ti thin films by combining glancing angleFinal published version, 5.33 MBLicence: Unspecified

Cite this

@article{48eda59c54ea4577b9750cd36d861d0e,

title = "Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study",

abstract = "In this work, glancing angle deposition and magnetron sputtering are combined to synthesize nanostructured Ti films. Different type of microstructures (tilted columns, straight pillars, zigzags) are obtained as a function of theexperimental conditions. As a support, kinetic Monte Carlo simulations are performed to understand the observed trends using the NASCAM (NAnoSCAle Modeling) code. The latter is used to simulate the growth of thefilms and to explain the effect on the obtained structures of experimental parameters such as the substrate temperature, the gas pressure as well as the substrate tilting and rotation speed. NASCAM enables quantitative predictionof the density, the surface roughness, and the columnshape asymmetry. In addition, the effective porosity (ϕe) of the structures was evaluated from the simulation data for two molecules presenting different size (0.64 and 3.20 nm). The results show that ϕe decreases with the size of the adsorbed molecule, from above 50% for the small molecule to below 10% for the larger one. This is understood by considering the accessibility of the pore as a function of the size of the molecules. These data are correlated to experimental results obtained bytransmission electron microscopy.",

keywords = "Monte Carlo simulation, Titanium Thin films, Glancing angle deposition, Magnetron sputtering, Nanostructured films, Porosity, Thin films, Titanium",

author = "Jonathan Dervaux and Pavel Moskovkin and P-A. Cormier and O. Douh{\'e}ret and Stephanos Konstantinidis and Roberto Lazzaroni and St{\'e}phane Lucas and Rony Snyders",

note = "Funding Information: The authors would like to thank the “F{\'e}d{\'e}ration Wallonie-Bruxelles” through the ARC project MADSSCELLS (AUWB-2012-12/17-UMONS No. 2), the Science Policy Office of the Belgian Federal Government through the “P{\^o}le d'Attraction Interuniversitaire” program (PAI, P7/34, “Plasma-Surface Interaction”, Ψ and PAI 7/5 {\textquoteleft}Functional Supramolecular Systems{\textquoteright}) and FNRS-FRFC. Dr Mireille RICHARD-PLOUET and St{\'e}phane Grolleau from Institut des Mat{\'e}riaux Jean Rouxel de Nantes (IMN) for the porosity measurements. SK is research associate of National Fund for Scientific Research (FNRS – Belgium). Publisher Copyright: {\textcopyright} 2017",

year = "2017",

month = aug,

day = "31",

doi = "10.1016/j.tsf.2017.06.006",

language = "English",

volume = "636",

pages = "644--657",

journal = "Thin Solid Films",

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publisher = "Elsevier",

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T1 - Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

AU - Dervaux, Jonathan

AU - Moskovkin, Pavel

AU - Cormier, P-A.

AU - Douhéret, O.

AU - Konstantinidis, Stephanos

AU - Lazzaroni, Roberto

AU - Lucas, Stéphane

AU - Snyders, Rony

N1 - Funding Information: The authors would like to thank the “Fédération Wallonie-Bruxelles” through the ARC project MADSSCELLS (AUWB-2012-12/17-UMONS No. 2), the Science Policy Office of the Belgian Federal Government through the “Pôle d'Attraction Interuniversitaire” program (PAI, P7/34, “Plasma-Surface Interaction”, Ψ and PAI 7/5 ‘Functional Supramolecular Systems’) and FNRS-FRFC. Dr Mireille RICHARD-PLOUET and Stéphane Grolleau from Institut des Matériaux Jean Rouxel de Nantes (IMN) for the porosity measurements. SK is research associate of National Fund for Scientific Research (FNRS – Belgium). Publisher Copyright: © 2017

PY - 2017/8/31

Y1 - 2017/8/31

N2 - In this work, glancing angle deposition and magnetron sputtering are combined to synthesize nanostructured Ti films. Different type of microstructures (tilted columns, straight pillars, zigzags) are obtained as a function of theexperimental conditions. As a support, kinetic Monte Carlo simulations are performed to understand the observed trends using the NASCAM (NAnoSCAle Modeling) code. The latter is used to simulate the growth of thefilms and to explain the effect on the obtained structures of experimental parameters such as the substrate temperature, the gas pressure as well as the substrate tilting and rotation speed. NASCAM enables quantitative predictionof the density, the surface roughness, and the columnshape asymmetry. In addition, the effective porosity (ϕe) of the structures was evaluated from the simulation data for two molecules presenting different size (0.64 and 3.20 nm). The results show that ϕe decreases with the size of the adsorbed molecule, from above 50% for the small molecule to below 10% for the larger one. This is understood by considering the accessibility of the pore as a function of the size of the molecules. These data are correlated to experimental results obtained bytransmission electron microscopy.

AB - In this work, glancing angle deposition and magnetron sputtering are combined to synthesize nanostructured Ti films. Different type of microstructures (tilted columns, straight pillars, zigzags) are obtained as a function of theexperimental conditions. As a support, kinetic Monte Carlo simulations are performed to understand the observed trends using the NASCAM (NAnoSCAle Modeling) code. The latter is used to simulate the growth of thefilms and to explain the effect on the obtained structures of experimental parameters such as the substrate temperature, the gas pressure as well as the substrate tilting and rotation speed. NASCAM enables quantitative predictionof the density, the surface roughness, and the columnshape asymmetry. In addition, the effective porosity (ϕe) of the structures was evaluated from the simulation data for two molecules presenting different size (0.64 and 3.20 nm). The results show that ϕe decreases with the size of the adsorbed molecule, from above 50% for the small molecule to below 10% for the larger one. This is understood by considering the accessibility of the pore as a function of the size of the molecules. These data are correlated to experimental results obtained bytransmission electron microscopy.

KW - Monte Carlo simulation

KW - Titanium Thin films

KW - Glancing angle deposition

KW - Magnetron sputtering

KW - Nanostructured films

KW - Porosity

KW - Thin films

KW - Titanium

UR - http://www.scopus.com/inward/record.url?scp=85022327523&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2017.06.006

DO - 10.1016/j.tsf.2017.06.006

M3 - Article

SN - 0040-6090

VL - 636

SP - 644

EP - 657

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

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Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

Abstract

Funding

Keywords

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Synthesis, Irradiation and Analysis of Materials (SIAM)

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