Synthesis and characterization of conductive titanium monoxide films: diffusion of silicon in titanium monoxide films

Kornely Grigorov, G. Grigorov, L. Drajeva, Daniel Bouchier, Robert Sporken, Roland Caudano

    Research output: Contribution to journalArticle

    Original languageEnglish
    Pages (from-to)153-155
    Number of pages3
    JournalVacuum
    Volume51
    Issue number2
    Publication statusPublished - 1998

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