The influence of primary ion nature and energy on ISS polar plots is studied experimentally and by simulation for scattering on a Cu(110) surface. The scattering of He and Ne ions in the energy range 1-3 keV is determined by the sampling depth of these ions. Simulations performed with the MARLOWE code show that helium ions analyse a large depth into the crystal while neon ions analyse the very first few atomic layers only.
|Number of pages||4|
|Publication status||Published - 1 Apr 1994|