Surface and layer state of thin Au-Al layers after high-energy ion irradiation measured by RBS, scanning ion microprobe and SEM

Andreas Markwitz, Guy Demortier

    Research output: Contribution to journalArticle

    Original languageEnglish
    Pages (from-to)889-895
    Number of pages7
    JournalSurface and interface analysis
    Volume25
    Publication statusPublished - 1997

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