Surface and interface optical phonons of a GaAs-AlGaAs superlattice measured by high resolution electron energy loss spectroscopy

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1028-1032
Number of pages5
JournalJournal of vacuum science & technology. B, Microelectronics processing and phenomena
Volume4
Publication statusPublished - 1986

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