Study of the influence of the pressure and rotational motion of 3D substrates processed by magnetron sputtering: A comparative study between Monte Carlo modelling and experiments

Martin Evrard, Aurelien Besnard, Stephane Lucas

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  • FEDER-FMF-3D-COATER: 3D-COATER

    Lucas, S.

    1/11/1531/12/20

    Project: Research