TY - JOUR
T1 - Study of the influence of the pressure and rotational motion of 3D substrates processed by magnetron sputtering
T2 - A comparative study between Monte Carlo modelling and experiments
AU - Evrard, Martin
AU - Besnard, Aurelien
AU - Lucas, Stephane
N1 - Funding Information:
The authors M. Evrard and S. Lucas gratefully acknowledge the financial support of the Walloon region under the FEDER and 3DCOATER-5: Convention N° 1610258, project 3215. The author A. Besnard also thanks the “Région Bourgogne Franche-Comté” for the concession of the grant (Rech-Mobi-000026).
Funding Information:
The authors M. Evrard and S. Lucas gratefully acknowledge the financial support of the Walloon region under the FEDER and 3DCOATER-5: Convention N° 1610258 , project 3215. The author A. Besnard also thanks the “ Région Bourgogne Franche-Comté ” for the concession of the grant ( Rech-Mobi-000026 ).
Publisher Copyright:
© 2019 Elsevier B.V.
PY - 2019/11/25
Y1 - 2019/11/25
N2 - Over the last ten years, low pressure plasma solutions for materials surface treatment have been remarkable. Nevertheless, the deposition of films with a uniform thickness on 3D complex shapes is still a challenge for various deposition systems. In several cases, concavities and different substrate orientations and motions lead to macroscopic shadowing and affect the thickness uniformity. The objective of this work is to describe a modelling method able to predict the layer thickness on any surface of 3D substrates in motion and subject to vapour transported in a low pressure vessel. The meshing of objects with Delaunay-triangulation enables the modelling of complex shapes. The deposition process consists of several Monte Carlo simulations involving first the computing of the angular and energy particles distribution from the source, second their transport through the chamber and last the deposition on a meshed substrate. The algorithm is optimised with a “cell-list-linked-like” method and differs from existing models by the computation speed. The benchmarking between simulation and experimental results for Cr, Ag and Ta deposition at various pressures and on moving complex substrates with several shadowed faces is presented. Moreover, particle energy distribution will be discussed for each sample surface, mode and pressure.
AB - Over the last ten years, low pressure plasma solutions for materials surface treatment have been remarkable. Nevertheless, the deposition of films with a uniform thickness on 3D complex shapes is still a challenge for various deposition systems. In several cases, concavities and different substrate orientations and motions lead to macroscopic shadowing and affect the thickness uniformity. The objective of this work is to describe a modelling method able to predict the layer thickness on any surface of 3D substrates in motion and subject to vapour transported in a low pressure vessel. The meshing of objects with Delaunay-triangulation enables the modelling of complex shapes. The deposition process consists of several Monte Carlo simulations involving first the computing of the angular and energy particles distribution from the source, second their transport through the chamber and last the deposition on a meshed substrate. The algorithm is optimised with a “cell-list-linked-like” method and differs from existing models by the computation speed. The benchmarking between simulation and experimental results for Cr, Ag and Ta deposition at various pressures and on moving complex substrates with several shadowed faces is presented. Moreover, particle energy distribution will be discussed for each sample surface, mode and pressure.
KW - 3D complex substrate
KW - macroscopic shadowing
KW - Monte-carlo simulation
KW - motion
KW - PVD
KW - thickness uniformity
UR - http://www.scopus.com/inward/record.url?scp=85074426894&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2019.125070
DO - 10.1016/j.surfcoat.2019.125070
M3 - Article
AN - SCOPUS:85074426894
SN - 0257-8972
VL - 378
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
M1 - 125070
ER -