Original language | French |
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Pages (from-to) | 151-157 |
Number of pages | 7 |
Journal | Surface and Coatings Technology |
Volume | 61 |
Publication status | Published - 1993 |
Study of the formation of a carbon layer on a sputtering target during magnetron-enhanced reactive sputtering
P. VANDEN BRANDE, Stephane Lucas, R. WINAND, R. RENARD, A. WEYMEERSCH
Research output: Contribution to journal › Article