Study of the electronic properties and depth profiles of buried and near-surface silicon nitride layers produced by ion implantation

Andreas Markwitz, M. Arps, H. Baumann, Guy Demortier, E.F. Krimmel, K. Bethge

    Research output: Contribution to journalArticle

    Original languageEnglish
    Pages (from-to)506-514
    Number of pages9
    JournalNuclear instruments and methods
    Publication statusPublished - 1997

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