Study of nanoparticles formation in a pulsed magnetron discharge in acetylene

Physics

• Magnetron 100%
• Growth 33%
• Parameter 33%
• Substrates 33%
• Silicon 33%
• Coating 33%
• Mass Spectroscopy 33%
• Polymerization 33%
• Vapor Phase 33%
• Roughness 33%

Material Science

• Morphology 66%
• Coating 33%
• Film 33%
• Plasma Polymerization 33%
• Silicon 33%
• Gas 33%
• Mass Spectrometry 33%

Chemical Engineering

• Acetylene 100%
• Silicon 33%
• Mass Spectrometry 33%
• Polymerization 33%