Study of nanoparticles formation in a pulsed magnetron discharge in acetylene

V. De Vriendt, F. Maseri, A. Nonet, S. Lucas

Research output: Contribution to journalArticle

Abstract

The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Original languageEnglish
Pages (from-to)S6-S10
JournalPlasma Processes and Polymers
Volume6
Issue numberSUPPL. 1
DOIs
Publication statusPublished - 1 Jan 2009

    Fingerprint

Keywords

  • pulsed magnetron discharge
  • nanoparticles
  • plasma polymerization
  • acetylene

Cite this