Study of nanoparticles formation in a pulsed magnetron discharge in acetylene

V. De Vriendt; F. Maseri; A. Nonet; S. Lucas

doi:10.1002/ppap.200930105

Study of nanoparticles formation in a pulsed magnetron discharge in acetylene

V. De Vriendt, F. Maseri, A. Nonet, S. Lucas

Namur Research Institute for Life Sciences

Research output: Contribution to journal › Article › peer-review

Abstract

The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Original language	English
Pages (from-to)	S6-S10
Journal	Plasma Processes and Polymers
Volume	6
Issue number	SUPPL. 1
DOIs	https://doi.org/10.1002/ppap.200930105
Publication status	Published - 1 Jan 2009

Keywords

pulsed magnetron discharge
nanoparticles
plasma polymerization
acetylene

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10.1002/ppap.200930105

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Scanning electron microscope
Charles Nicaise (Manager) & Francesca Cecchet (Manager)
Technological Platform Morphology - Imaging
Facility/equipment: Equipment
Synthesis, Irradiation and Analysis of Materials (SIAM)
Pierre Louette (Manager), Julien Colaux (Manager), Alexandre Felten (Manager) & Jorge Humberto Mejia Mendoza (Manager)
Technological Platform Synthesis, Irradiation and Analysis of Materials
Facility/equipment: Technological Platform

Cite this

@article{742f3c8aef0744c5abee54c6cf5cf46b,

title = "Study of nanoparticles formation in a pulsed magnetron discharge in acetylene",

abstract = "The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. {\textcopyright} 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.",

keywords = "pulsed magnetron discharge, nanoparticles, plasma polymerization, acetylene",

author = "{De Vriendt}, V. and F. Maseri and A. Nonet and S. Lucas",

year = "2009",

month = jan,

day = "1",

doi = "10.1002/ppap.200930105",

language = "English",

volume = "6",

pages = "S6--S10",

journal = "Plasma Processes and Polymers ",

issn = "1612-8850",

publisher = "Wiley-VCH Verlag",

number = "SUPPL. 1",

}

TY - JOUR

T1 - Study of nanoparticles formation in a pulsed magnetron discharge in acetylene

AU - De Vriendt, V.

AU - Maseri, F.

AU - Nonet, A.

AU - Lucas, S.

PY - 2009/1/1

Y1 - 2009/1/1

N2 - The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

AB - The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

KW - pulsed magnetron discharge

KW - nanoparticles

KW - plasma polymerization

KW - acetylene

UR - http://www.scopus.com/inward/record.url?scp=76749107885&partnerID=8YFLogxK

U2 - 10.1002/ppap.200930105

DO - 10.1002/ppap.200930105

M3 - Article

VL - 6

SP - S6-S10

JO - Plasma Processes and Polymers

JF - Plasma Processes and Polymers

SN - 1612-8850

IS - SUPPL. 1

ER -

Study of nanoparticles formation in a pulsed magnetron discharge in acetylene

Abstract

Keywords

Access to Document

Scanning electron microscope

Synthesis, Irradiation and Analysis of Materials (SIAM)

Cite this