Abstract
| Original language | English |
|---|---|
| Pages (from-to) | S6-S10 |
| Journal | Plasma Processes and Polymers |
| Volume | 6 |
| Issue number | SUPPL. 1 |
| DOIs | |
| Publication status | Published - 1 Jan 2009 |
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Keywords
- pulsed magnetron discharge
- nanoparticles
- plasma polymerization
- acetylene
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Study of nanoparticles formation in a pulsed magnetron discharge in acetylene. / De Vriendt, V.; Maseri, F.; Nonet, A.; Lucas, S.
In: Plasma Processes and Polymers , Vol. 6, No. SUPPL. 1, 01.01.2009, p. S6-S10.Research output: Contribution to journal › Article
TY - JOUR
T1 - Study of nanoparticles formation in a pulsed magnetron discharge in acetylene
AU - De Vriendt, V.
AU - Maseri, F.
AU - Nonet, A.
AU - Lucas, S.
PY - 2009/1/1
Y1 - 2009/1/1
N2 - The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
AB - The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
KW - pulsed magnetron discharge
KW - nanoparticles
KW - plasma polymerization
KW - acetylene
UR - http://www.scopus.com/inward/record.url?scp=76749107885&partnerID=8YFLogxK
U2 - 10.1002/ppap.200930105
DO - 10.1002/ppap.200930105
M3 - Article
VL - 6
SP - S6-S10
JO - Plasma Processes and Polymers
JF - Plasma Processes and Polymers
SN - 1612-8850
IS - SUPPL. 1
ER -