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Stress reduction of PACVD amorphous diamond coatings by boron addition
Veit Wagner
, E. Dekempeneer
, Jan Geurts
, L. Van Ijzendoorn
,
Robert Sporken
,
Roland Caudano
Research output
:
Contribution to journal
›
Article
Overview
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Dive into the research topics of 'Stress reduction of PACVD amorphous diamond coatings by boron addition'. Together they form a unique fingerprint.
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Keyphrases
Stress Reduction
100%
Boron Addition
100%
Plasma-assisted Chemical Vapor Deposition (PACVD)
100%
Amorphous Diamond
100%
Diamond Coating
100%
Internal Stress
66%
Boron
66%
Boron Content
66%
Hydrogenation
33%
Carbon Film
33%
Silicon Substrate
33%
Infrared Spectroscopy
33%
Intrinsic Stress
33%
High Hardness
33%
Reflection Measurement
33%
Adhesion
33%
Superhard Coatings
33%
Reactor
33%
Diamond-like
33%
Capacitively Coupled
33%
Gas Mixture
33%
Carbon Network
33%
Optimal Process Parameters
33%
Tribofilm
33%
Film Stress
33%
Raman Spectroscopy
33%
Hardness Values
33%
Depth-sensing Indentation
33%
Deposition Layer
33%
B2H6
33%
Hard Compounds
33%
Laser Reflection
33%
Microscopic Structure Analysis
33%
Film Properties
33%
Growth Process
33%
INIS
boron additions
100%
coatings
100%
boron
80%
hardness
60%
residual stresses
40%
spectroscopy
20%
lasers
20%
reactors
20%
mixtures
20%
thickness
20%
hydrogenation
20%
gases
20%
reflection
20%
Engineering
Gas Mixture
50%
Indentation
50%
Material Science
Gas Mixture
20%