Stress reduction of PACVD amorphous diamond coatings by boron addition

Keyphrases

• Stress Reduction 100%
• Boron Addition 100%
• Diamond Coating 100%
• Plasma-enhanced Chemical Vapor Deposition (PECVD) 100%
• Amorphous Diamond 100%
• Internal Stress 66%
• Boron 66%
• Boron Content 66%
• Hydrogenation 33%
• Carbon Film 33%
• Silicon Substrate 33%
• Infrared Spectroscopy 33%
• Intrinsic Stress 33%
• High Hardness 33%
• Reflection Measurement 33%
• Adhesion 33%
• Superhard Coatings 33%
• Reactor 33%
• Diamond-like 33%
• Capacitively Coupled 33%
• Gas Mixture 33%
• Carbon Network 33%
• Optimal Process Parameters 33%
• Tribofilm 33%
• Film Stress 33%
• Raman Spectroscopy 33%
• Depth-sensing Indentation 33%
• Deposition Layer 33%
• B2H6 33%
• Hard Compounds 33%
• Laser Reflection 33%
• Microscopic Structure Analysis 33%
• Film Properties 33%
• Growth Process 33%
• Hardness Value 33%

INIS

• reduction 100%
• diamonds 100%
• films 100%
• boron additions 100%
• coatings 100%
• boron 80%
• hardness 60%
• carbon 40%
• residual stresses 40%
• applications 20%
• values 20%
• growth 20%
• adhesion 20%
• modifications 20%
• layers 20%
• increasing 20%
• depth 20%
• silicon 20%
• substrates 20%
• spectroscopy 20%
• lasers 20%
• reactors 20%
• mixtures 20%
• thickness 20%
• hydrogenation 20%
• gases 20%
• reflection 20%

Material Science

• Boron 100%
• Diamond 100%
• Film 80%
• Hydrogenation 20%
• Diamond Like Carbon Films 20%
• Raman Spectroscopy 20%
• Hard Coating 20%
• Silicon Substrate 20%
• Gas Mixture 20%