Strain relaxation in high Ge content SiGe layers deposited on Si

Giovanni Capellini, Monica De Seta, Yan Busby, Marialilia Pea, Florestano Evangelisti, Giovanni Nicotra, Corrado Spinella, Michele Nardone, Claudio Ferrari

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
JournalJournal of Applied Physics
Volume107
Issue number6
DOIs
Publication statusPublished - 15 Mar 2010
Externally publishedYes

Cite this