SOI nano device fabrication

Xiaohui Tang, Nicolas Reckinger, V. Bayot

    Research output: Contribution to conferenceAbstractpeer-review

    Original languageEnglish
    Publication statusPublished - 2004
    EventAdvanced Research workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment - , Ukraine
    Duration: 26 Apr 200430 Apr 2004

    Scientific committee

    Scientific committeeAdvanced Research workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment
    CountryUkraine
    Period26/04/0430/04/04

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