Single source precursor vs. precursor mixture for N-rich plasma polymer deposition: Plasma diagnostics and thin film analyses

Madhuwanthi Buddhadasa, Cédric Vandenabeele, Pierre Luc Girard-Lauriault, Rony Snyders

Research output: Contribution to journalArticle

Abstract

Two distinct methods of producing N-rich films, that mainly differ in their choice of precursor are compared; the first method involves a single source precursor and the second, a mixture of precursors that consists of a heteroatom source gas and hydrocarbon (HC) gas. Plasma diagnostics and thin film chemistry of allylamine (AA), cyclopropylamine (CPA), ammonia/ethylene (AmEt) and ammonia/1,3-butadiene (AmBu) are studied, while maintaining the same N to C ratio, 1 to 3, in the gas phase. Single source precursors produce films containing higher N, whereas, precursor mixtures, owing to reduced dehydrogenation, produce films with a low nitrile content. While similarities between fragmentation patterns of single source precursors and precursor mixtures are observed in the plasma phase as the energy supplied is increased, chemical differences still exist between films produced by these two methods, within the studied range of power.

Original languageEnglish
Article number1700030
Number of pages14
JournalPlasma Processes and Polymers
Volume14
Issue number11
DOIs
Publication statusPublished - 15 May 2017
Externally publishedYes

Fingerprint

Plasma diagnostics
plasma diagnostics
Polymers
Plasmas
Thin films
Gases
polymers
thin films
Ammonia
Allylamine
ammonia
Nitriles
Dehydrogenation
Hydrocarbons
Butadiene
nitriles
butadiene
dehydrogenation
Ethylene
gases

Keywords

  • FT-IR
  • N-rich plasma polymer films
  • XPS
  • mass spectrometry
  • plasma diagnostics

Cite this

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title = "Single source precursor vs. precursor mixture for N-rich plasma polymer deposition: Plasma diagnostics and thin film analyses",
abstract = "Two distinct methods of producing N-rich films, that mainly differ in their choice of precursor are compared; the first method involves a single source precursor and the second, a mixture of precursors that consists of a heteroatom source gas and hydrocarbon (HC) gas. Plasma diagnostics and thin film chemistry of allylamine (AA), cyclopropylamine (CPA), ammonia/ethylene (AmEt) and ammonia/1,3-butadiene (AmBu) are studied, while maintaining the same N to C ratio, 1 to 3, in the gas phase. Single source precursors produce films containing higher N, whereas, precursor mixtures, owing to reduced dehydrogenation, produce films with a low nitrile content. While similarities between fragmentation patterns of single source precursors and precursor mixtures are observed in the plasma phase as the energy supplied is increased, chemical differences still exist between films produced by these two methods, within the studied range of power.",
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Single source precursor vs. precursor mixture for N-rich plasma polymer deposition: Plasma diagnostics and thin film analyses. / Buddhadasa, Madhuwanthi; Vandenabeele, Cédric; Girard-Lauriault, Pierre Luc; Snyders, Rony.

In: Plasma Processes and Polymers , Vol. 14, No. 11, 1700030, 15.05.2017.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Single source precursor vs. precursor mixture for N-rich plasma polymer deposition: Plasma diagnostics and thin film analyses

AU - Buddhadasa, Madhuwanthi

AU - Vandenabeele, Cédric

AU - Girard-Lauriault, Pierre Luc

AU - Snyders, Rony

PY - 2017/5/15

Y1 - 2017/5/15

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AB - Two distinct methods of producing N-rich films, that mainly differ in their choice of precursor are compared; the first method involves a single source precursor and the second, a mixture of precursors that consists of a heteroatom source gas and hydrocarbon (HC) gas. Plasma diagnostics and thin film chemistry of allylamine (AA), cyclopropylamine (CPA), ammonia/ethylene (AmEt) and ammonia/1,3-butadiene (AmBu) are studied, while maintaining the same N to C ratio, 1 to 3, in the gas phase. Single source precursors produce films containing higher N, whereas, precursor mixtures, owing to reduced dehydrogenation, produce films with a low nitrile content. While similarities between fragmentation patterns of single source precursors and precursor mixtures are observed in the plasma phase as the energy supplied is increased, chemical differences still exist between films produced by these two methods, within the studied range of power.

KW - FT-IR

KW - N-rich plasma polymer films

KW - XPS

KW - mass spectrometry

KW - plasma diagnostics

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