Silicon oxynitride and aluminum films interface : Rutherford backscattering and high resolution electron-energy-loss spectroscopic studies

Deda Diatezua Manpuya, Paul Thiry, Guy Terwagne, Roland Caudano

    Research output: Contribution to journalArticlepeer-review

    55 Downloads (Pure)
    Original languageEnglish
    Pages (from-to)1054-1059
    Number of pages6
    JournalSurface Science
    Volume269-270
    Publication statusPublished - 1992

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