Original language | English |
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Pages (from-to) | 4643-4648 |
Number of pages | 6 |
Journal | Journal of Applied Physics |
Volume | 86 |
Publication status | Published - 1999 |
Reaction of Si(100) with Silane-Methane Low-Power Plasma; SiC Buffer layer formation
Carla Bittencourt Papaleo Montes
Research output: Contribution to journal › Article